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Figure S5

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posted on 2024-08-16, 12:06 authored by Amnon Rothman, Seunggi Seo, Jacob Woodruff, Hyungjun Kim, Stacey Bent
Average diameter of Ru nanoparticles on the surface, using RuCpEt(CO)2 as a precursor, vs. ALD cycle. The black squares, red circles, and blue triangles represent ALD of Ru without pretreatment, with TMA pretreatment and DEZ pretreatment, respectively.

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    JVST A: Vacuum, Surfaces, and Films

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    Atomic Layer depositionChemical Engineering

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    CC BY-NC 4.0

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