Figure S3

Nuclei density (red data points) and average diameter of Ru nanoparticles on the surface (blue data points), using Ru(Cp)2 as a precursor, vs. ALD cycle. All the red and blue curves shown are guides to the eye, except for the blue curves in (b,c), which fit the square root of the ALD cycle number. Reprinted with permission from reference 17 in the main manuscript. Copyright 2018 American Chemical Society.