Fig. S1, Fig. S2

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posted on 2025-09-04, 12:05 authored by Conglin Zhang, Binbin Luo, Chenyan Wang, Ze Shang, Wei Meng, Bao Zhu, Xiao-Han Wu, Shi-Jin Ding

Cross-sectional HRTEM images together with inserted FFT patterns in multiple random domains for the as-deposited ZrO2 films with OPPT of (a-c) 3 s, (d-f) 5 s, and (g-i) 10 s

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DOI - Is supplement to <strong>Impact of oxygen plasma pulse time on atomic-layer-deposited ZrO<sub>2</sub> antiferroelectric energy storage capacitors</strong>

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high-resolution transmission electron microscopy antiferroelectric energy storage

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