Fig.S1-9, Table S1.

The supplementary material for the experimental setup, temperature program, optical images corresponding to different temperature programs, size statistics of 2L WSe2, schematic illustration of the growth of WSe2, electrical characterization of 3L WSe2, the output characteristics of the 1-2L WSe2 FETs, Rc extraction of 1L and 2L WSe2 FETs, schematic illustration of the band alignment between 1L to 3L WSe2 and metal Pt contacts, performance comparison between this study and previous ones, experimental parameters, and characterization methods.