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Atomic percentage from EELS spectra

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posted on 2024-08-21, 12:02 authored by Haicheng Cao, Mingtao Nong, Jiaqiang Li, Xiao Tang, Tingang Liu, Zhiyuan Liu, Biplab Sarkar, Zhiping Lai, Ying Wu, Xiaohang Li

The evaluated atomic percentage of all the elements from EELS spectra for TiAlTi and TiAlTiAu metal stack.

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Aluminum Nitride MOCVD Ohmic contact TLM

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