AIP Publishing
Browse

Advanced perspective on heavily phosphorus-doped diamond layers via optical emission spectroscopy

Download (2.27 MB)
figure
posted on 2025-01-21, 05:05 authored by Kil-dong Sung, Stefan Irimiciuc, Michal Novotny, Zdeněk Weiss, Pavel Hubik, Martin Vondracek, Vincent MORTET
see the attached file

History

Usage metrics

    APL Materials

    Categories

    Keywords

    Phosphorus-doped diamond layerPlasma diagnosticDynamic gas flowPhosphorus incorporation efficiencyPhosphorus contamination

    Licence

    CC BY 4.0

    Exports

    RefWorks
    BibTeX
    Ref. manager
    Endnote
    DataCite
    NLM
    DC