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posted on 2024-07-01, 04:05 authored by Haengha Seo, Han Sol Park, Seong Tak Cho, Jonghoon Shin, Junil Lim, Tae Kyun Kim, Heewon Paik, Haewon Song, Cheol Seong Hwang
sample preparation and calculation data

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    Journal of Applied Physics

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    zirconium oxide filmatomic layer depositionX-ray diffractionintrinsic and extrinsic strainsaluminum and yttrium doping

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