The investigation on properties of the TiSiN/TiSi-DLC multilayer coatings prepared by hybrid deposition technique

Name: The investigation on properties of the TiSiN/TiSi-DLC multilayer coatings prepared by hybrid deposition technique
Published: 2025-03-03T05:09:22+00:00
License: https://creativecommons.org/licenses/by-nc/4.0/
Keywords: Figure, Dataset

dataset

posted on 2025-03-03, 05:09 authored by Menghui Chen, Mai Yang, Tao Huang, Yibing Su, Yuzhe Han, Qizhong LI, Meijun Yang, Song Zhang, Takashi Goto, Rong Tu

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The investigation on properties of the TiSiN/TiSi-DLC multilayer coatings prepared by hybrid deposition technique

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