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Supporting Data

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posted on 2024-11-18, 05:08 authored by Daniel Rodriguez, Mai Her, Igor Usov, Douglas J. Safarik, Rommel Jones, Michael Heidlage, Timothy Gorey
Data herein may be used to re-create plotted graphs.

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    Review of Scientific Instruments

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    Keywords

    atomic layer depositionthin filmsscalable

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    CC BY 4.0

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