AIP Publishing
Browse

Supplementary material

Download (842.11 kB)
dataset
posted on 2025-05-28, 12:09 authored by Premrudee Promdet, Pentti Niiranen, Simon Lagerkvist, Daniel Lundin, Henrik Pedersen
Additional results

History

Related Materials

  1. 1.
    DOI - Is supplement to <strong>Self-limiting deposition of copper from copper <em>beta</em>-diketonates and plasma electrons</strong>

Usage metrics

    JVST A: Vacuum, Surfaces, and Films

    Categories

    Keywords

    CVDALDCopper

    Licence

    CC BY 4.0

    Exports

    RefWorks
    BibTeX
    Ref. manager
    Endnote
    DataCite
    NLM
    DC