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posted on 2025-03-24, 04:03 authored by Xianchao Wei, Zhengji Xia, Shuyao Yan, Zhikun Zhou, Lei Sang, Wen Huang
Detailed fabrication flow

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    DOI - Is supplement to <strong>On-chip Compact Radio Frequency Metal Self-rolled-up Nanomembrane Resonator</strong>

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    Applied Physics Letters

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    Self-rolled-up nanomembraneRF resonatorsMiniaturization

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