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posted on 2025-11-04, 13:03 authored by Nidhi Choudhary, Silke Peeters, Ciaran Lennon, Dmytro Besprozvannyy, H.C.M. Knoops, Ian MacLaren, Robert Hadfield
Revised supplementary material file after review 1. It contains the data that support some important information provided in the main manuscript file.

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    DOI - Is supplement to <strong>Transmission electron microscopy analysis of atomic layer deposited NbTiN/NbN superconducting thin films</strong>

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    Atomic layer depositionTransmission electron microscopyQuantum technologies

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