Supplementary Material 2

Name: Supplementary Material 2
Published: 2025-11-25T13:06:34+00:00
License: https://creativecommons.org/licenses/by/4.0/
Keywords: ULIE-SIMS calibration, ECV measurements, Si diffusion

https://doi.org/10.60893/figshare.jap.30524282

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posted on 2025-11-25, 13:06 authored by Adrianna Rejmer, Ayse Ozcan Atar, Walery Kolkowski, Iwona Pasternak, Sylwia Kozdra, Andrzej Materna, Emanuele Pelucchi, Wlodzimierz Strupinski, Pawel Michalowski

This file contains raw ULIE-SIMS data for calibration samples C1-C6

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