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posted on 2025-06-20, 04:08 authored by Yi Chen, Daniel Cho, John Hoang, Nick Altieri, Ji Zhu, Samantha Tan, Jane Chang
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    JVST A: Vacuum, Surfaces, and Films

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    Keywords

    Thermal etchSelective SiGe etchKinetics model

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    CC BY-NC 4.0

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