AIP Publishing
Browse

Supplement number 1

Download (23.5 kB)
dataset
posted on 2025-07-30, 12:09 authored by Jinyu Chong, Rose Kopf, Jake Kaufman, Chen Xu, Mark Cappuzzo, Alaric Tate, Ting-Chen Hu, Mark Earnshaw
supplementary Material

History

Related Materials

  1. 1.
    DOI - Is supplement to <strong>Diamond-Like Carbon (DLC) thin film fabrication by Plasma Enhanced Chemical Vapor Deposition (PECVD) using CH<sub>4</sub>/N<sub>2</sub> gas mixtures for use as a hard mask </strong>

Usage metrics

    JVST B: Nanotechnology and Microelectronics

    Categories

    Keywords

    Diamond-like CarbonHard Mask FabricationEtching

    Licence

    CC BY 4.0

    Exports

    RefWorks
    BibTeX
    Ref. manager
    Endnote
    DataCite
    NLM
    DC