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posted on 2025-02-13, 13:06 authored by Topias Jussila, Joona Pekkanen, Anni Virta, Amr Ghazy, Mika Lastusaari, Maarit Karppinen
Supplemental Experimental Data

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    JVST A: Vacuum, Surfaces, and Films

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    Keywords

    Atomic layer deposition; Molecular layer deposition

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    CC BY-NC 4.0

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