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PEALD_TiN_Supplementary__Revised

Name: PEALD_TiN_Supplementary__Revised
Published: 2024-08-07T12:02:17+00:00
License: https://creativecommons.org/licenses/by-nc/4.0/
Keywords: Superconductivity, Plasma enhanced atomic layer deposition, Titanium nitride

dataset

posted on 2024-08-07, 12:02 authored by John Femi-Oyetoro, Sasha Sypkens, Henry LeDuc, Matthew Dickie, Andrew Beyer, Peter Day, Frank Greer

Revised supplemental material

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Superconductivity Plasma enhanced atomic layer deposition Titanium nitride

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CC BY-NC 4.0

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