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Experimental Characterization of a Mode-Localized Acceleration Sensor Integrating Electrostatically Coupled Resonators

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posted on 2024-02-22, 12:55 authored by AIP AdminAIP Admin, Ming Lyu, Jian Zhao, Najib Kacem, Rigumala Wu and Rongjian Sun
The classical electrostatically driven double-ended solidly supported MEMS resonator

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