AIP Publishing
Browse

Experimental Characterization of a Mode-Localized Acceleration Sensor Integrating Electrostatically Coupled Resonators

Download (122.49 kB)
dataset
posted on 2024-02-22, 12:55 authored by AIP AdminAIP Admin, Ming Lyu, Jian Zhao, Najib Kacem, Rigumala Wu and Rongjian Sun
The classical electrostatically driven double-ended solidly supported MEMS resonator

History

Usage metrics

    Journal of Applied Physics

    Categories

    Keywords

    mode localizationacceleration sensorexperimental characterization

    Licence

    CC0

    Exports

    RefWorks
    BibTeX
    Ref. manager
    Endnote
    DataCite
    NLM
    DC